Vacuum sensors are indispensable in cutting-edge fields ranging from semiconductor manufacturing to space exploration. Yet current technologies often trade measurement range for accuracy—or vice versa ...
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Researchers develop novel dual-mode MEMS sensor for wide-range vacuum pressure detection
A research team led by Profs. Chen Deyong and Wang Junbo from the Aerospace Information Research Institute (AIR) of the Chinese Academy of Sciences has developed a novel microsensor that enhances both ...
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